VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
Silicon (UnDoped): Si(2p3)&(2p1),BE Cu(2p3)=932.68
1
freshly exposed bulk, no ion etching
NORM
REGULAR
1
0
0
0
0
0
1
freshly exposed bulk, no ion etching
Silicon (UnDoped): Si(2p3)&(2p1),BE Cu(2p3)=932.68
2003
5
10
14
48
50
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
14.25
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
112
-0.05
2
counts
d
Transmission
d
pulse counting
0.1
10
4.00E-06
0
0
0
0
802
2
838
0.378696
0.381441
36
0.381441
43
0.381434
51
0.381427
52
0.38142
24
0.381413
30
0.381406
28
0.381399
40
0.381392
31
0.381385
32
0.381378
32
0.381371
46
0.381364
32
0.381357
44
0.38135
42
0.381343
35
0.381337
49
0.38133
42
0.381323
32
0.381316
44
0.381309
27
0.381302
30
0.381295
39
0.381288
51
0.381281
23
0.381274
28
0.381267
23
0.38126
32
0.381253
41
0.381246
37
0.381239
23
0.381233
35
0.381226
34
0.381219
34
0.381212
38
0.381205
36
0.381198
21
0.381191
34
0.381184
33
0.381177
42
0.38117
27
0.381163
33
0.381156
34
0.381149
33
0.381143
33
0.381136
36
0.381129
36
0.381122
23
0.381115
42
0.381108
30
0.381101
21
0.381094
31
0.381087
41
0.38108
33
0.381073
19
0.381066
41
0.38106
36
0.381053
41
0.381046
30
0.381039
24
0.381032
25
0.381025
35
0.381018
27
0.381011
32
0.381004
26
0.380997
29
0.38099
33
0.380983
39
0.380977
28
0.38097
32
0.380963
26
0.380956
36
0.380949
25
0.380942
33
0.380935
23
0.380928
39
0.380921
29
0.380914
23
0.380907
31
0.380901
17
0.380894
29
0.380887
33
0.38088
30
0.380873
26
0.380866
24
0.380859
20
0.380852
35
0.380845
33
0.380838
30
0.380832
29
0.380825
30
0.380818
19
0.380811
31
0.380804
33
0.380797
20
0.38079
33
0.380783
30
0.380776
18
0.380769
28
0.380762
27
0.380756
23
0.380749
25
0.380742
33
0.380735
26
0.380728
34
0.380721
19
0.380714
31
0.380707
27
0.3807
16
0.380693
19
0.380687
26
0.38068
21
0.380673
28
0.380666
26
0.380659
20
0.380652
21
0.380645
25
0.380638
36
0.380631
28
0.380625
24
0.380618
24
0.380611
26
0.380604
25
0.380597
18
0.38059
31
0.380583
24
0.380576
13
0.380569
23
0.380563
20
0.380556
27
0.380549
29
0.380542
19
0.380535
21
0.380528
28
0.380521
20
0.380514
18
0.380507
29
0.380501
25
0.380494
26
0.380487
20
0.38048
39
0.380473
35
0.380466
32
0.380459
38
0.380452
33
0.380445
36
0.380439
38
0.380432
31
0.380425
36
0.380418
40
0.380411
46
0.380404
51
0.380397
60
0.38039
56
0.380384
64
0.380377
56
0.38037
55
0.380363
63
0.380356
63
0.380349
65
0.380342
81
0.380335
75
0.380328
69
0.380322
73
0.380315
84
0.380308
93
0.380301
98
0.380294
89
0.380287
69
0.38028
73
0.380273
90
0.380267
94
0.38026
78
0.380253
73
0.380246
96
0.380239
91
0.380232
83
0.380225
82
0.380219
87
0.380212
92
0.380205
76
0.380198
65
0.380191
85
0.380184
80
0.380177
77
0.38017
73
0.380164
94
0.380157
72
0.38015
66
0.380143
70
0.380136
71
0.380129
54
0.380122
55
0.380115
59
0.380109
65
0.380102
56
0.380095
45
0.380088
52
0.380081
45
0.380074
44
0.380067
27
0.380061
40
0.380054
38
0.380047
42
0.38004
27
0.380033
30
0.380026
32
0.380019
28
0.380013
30
0.380006
26
0.379999
44
0.379992
31
0.379985
40
0.379978
25
0.379971
39
0.379965
45
0.379958
41
0.379951
52
0.379944
39
0.379937
52
0.37993
53
0.379923
63
0.379917
63
0.37991
73
0.379903
87
0.379896
104
0.379889
126
0.379882
158
0.379875
196
0.379869
282
0.379862
309
0.379855
417
0.379848
509
0.379841
447
0.379834
489
0.379827
410
0.379821
362
0.379814
308
0.379807
289
0.3798
315
0.379793
404
0.379786
492
0.37978
667
0.379773
760
0.379766
776
0.379759
838
0.379752
777
0.379745
695
0.379738
545
0.379732
384
0.379725
252
0.379718
162
0.379711
92
0.379704
53
0.379697
51
0.379691
30
0.379684
21
0.379677
16
0.37967
19
0.379663
21
0.379656
11
0.37965
9
0.379643
11
0.379636
11
0.379629
11
0.379622
8
0.379615
16
0.379608
8
0.379602
10
0.379595
12
0.379588
7
0.379581
11
0.379574
5
0.379567
11
0.379561
12
0.379554
12
0.379547
6
0.37954
10
0.379533
16
0.379526
11
0.37952
12
0.379513
12
0.379506
12
0.379499
10
0.379492
13
0.379485
16
0.379479
9
0.379472
8
0.379465
14
0.379458
10
0.379451
9
0.379444
10
0.379438
9
0.379431
16
0.379424
12
0.379417
16
0.37941
9
0.379404
5
0.379397
9
0.37939
16
0.379383
15
0.379376
17
0.379369
5
0.379363
7
0.379356
16
0.379349
14
0.379342
13
0.379335
13
0.379328
4
0.379322
8
0.379315
8
0.379308
10
0.379301
10
0.379294
12
0.379288
7
0.379281
4
0.379274
6
0.379267
11
0.37926
6
0.379253
10
0.379247
8
0.37924
9
0.379233
6
0.379226
9
0.379219
11
0.379213
6
0.379206
11
0.379199
3
0.379192
4
0.379185
4
0.379178
4
0.379172
7
0.379165
5
0.379158
7
0.379151
11
0.379144
7
0.379138
7
0.379131
10
0.379124
7
0.379117
6
0.37911
6
0.379103
6
0.379097
8
0.37909
5
0.379083
3
0.379076
5
0.379069
6
0.379063
8
0.379056
16
0.379049
12
0.379042
11
0.379035
9
0.379029
7
0.379022
7
0.379015
8
0.379008
4
0.379001
14
0.378995
8
0.378988
8
0.378981
11
0.378974
8
0.378967
8
0.378961
6
0.378954
11
0.378947
8
0.37894
9
0.378933
3
0.378927
6
0.37892
12
0.378913
8
0.378906
6
0.378899
15
0.378893
7
0.378886
8
0.378879
10
0.378872
4
0.378865
8
0.378859
12
0.378852
10
0.378845
8
0.378838
12
0.378831
10
0.378825
11
0.378818
8
0.378811
2
0.378804
8
0.378797
8
0.378791
9
0.378784
3
0.378777
8
0.37877
4
0.378763
7
0.378757
3
0.37875
6
0.378743
6
0.378736
11
0.378729
10
0.378723
8
0.378716
9
0.378709
16
0.378702
7
0.378696
end of experiment
